AVS 49th International Symposium
    Vacuum Technology Thursday Sessions
       Session VT-ThM

Paper VT-ThM9
Pumping Performance Investigation of a Turbo Booster Vacuum Pump Equipped with Spiral-Grooved Rotor and Inner Housing by CFD Method

Thursday, November 7, 2002, 11:00 am, Room C-104

Session: Gas Dynamics and Flow
Presenter: H.-P. Cheng, National Taipei University of Technology, Taiwan
Authors: H.-P. Cheng, National Taipei University of Technology, Taiwan
C.-P. Chien, National Taipei University of Technology, Taiwan
C.-P. Lee, China Engineering Consultants, INC
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This paper estimates the pumping performance of a turbo booster vacuum pump equipped with spiral-grooved rotor and inner housing by CFD method. The computational domain hybrids the flow channels in the rotor and inner housing, thus the gas can flow continuously from the inlet of rotor through the outlet then into the inlet of inner housing and exist. The pumping characteristics for the spiral angle of the rotor, and the groove number and the spiral angle of the inner housing are detailed investigated. The spiral angle, 15 degrees, of rotor can adequately increase the effective pumping length of the flow channel and overcome the following increased friction force, therefore the pumping performance can be enhanced. Similarly, the spiral-grooved inner housing with 5 grooves and spiral angle 27 degrees can also have the better pumping performance. The results also indicate that there is an axial vortex dominated the spiral-grooved flow channel of both rotor and inner housing. The back stream from rotor channel to the vacuum chamber is evident. Otherwise, the detailed three-dimensional velocity vector, axial velocity contour, and pressure fields are shown in the paper. The arithmetic axial pressure distribution, compression ratio are also discussed. The pumping performance of two prototypes are also measured and shown in the paper. The discrepancies among experiments, simulation, and expected target are discussed.