AVS 49th International Symposium
    Vacuum Technology Thursday Sessions
       Session VT-ThM

Paper VT-ThM2
Developing of Calculation Methods of Diffusion Vacuum Pumps' Characteristics

Thursday, November 7, 2002, 8:40 am, Room C-104

Session: Gas Dynamics and Flow
Presenter: B.N. Kemenov, NPK INTELVAC, Russia
Authors: M.G. Sapeshinsky, Bauman Moscow State Technical University, Russia
B.N. Kemenov, NPK INTELVAC, Russia
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Results on 3-dimensional mathematic simulations of processes in an inlet chamber of diffusion vacuum pumps, of interaction between pumped out gas and steam molecules are presented. Description of algorithmus and of a calculation programs complex for characteristics of diffusion vacuum pumps is given. Using the developed calculation programs the influence of parameters and form of a steam flow, geometry of a body, as well as of an oil reflector and protecting screens, on operation rate and on reverse oil flow of diffusion pumps is investigated. Rated and experimental data are compared. The concept of optimisation of an inlet chamber of diffusion pumps is developed