AVS 49th International Symposium
    Thin Films Wednesday Sessions
       Session TF-WeP

Paper TF-WeP9
Properties of Co-deposited ITO and ZnO Films Using a Bi-polar Pulse Power Supply and a Dual Magnetron Sputter Source

Wednesday, November 6, 2002, 11:00 am, Room Exhibit Hall B2

Session: Poster Session
Presenter: M.S. Hwang, ITM, Inc., Korea
Authors: M.S. Hwang, ITM, Inc., Korea
H.S. Jeong, ITM, Inc., Korea
Y.W. Seo, ITM, Inc., Korea
Correspondent: Click to Email
Multilayer coatings consisting of metal layers sandwiched between transparent conducting oxide(TCO) layers are widely used for flat panel display electrodes and electromagnetic shield coatings for plasma displays, due to their high electrical conductivity and light transmittance. The electrical and optical properties of these multilayer films depend largely on the surface characteristics of the TCO thin films. A smoother surface on the TCO thins films makes it easier for the metal layer to form a continuous film, thus resulting in a higher conductivity and visible light transmittance. ITO and ZnO films were co-deposited, using a dual magnetron sputter and a bi-polar pulse power supply, to decrease the surface roughness of the TCO films. The symmetric pulse mode of the power supply was used to simultaneously sputter an In2O3 (90wt%) : SnO2 (10wt%) target and a ZnO target. We varied the duty of the pulses to control the ratio of ITO : ZnO in the thin films. The electrical and optical properties of the films were studied, and special attention was paid to the surface roughness and the crystallinity of the films.