AVS 49th International Symposium
    Thin Films Tuesday Sessions
       Session TF-TuP

Paper TF-TuP5
Control of Epitaxial Film Growth of CuO and Cu@sub 2@O by Reactive-dc Magnetron Sputtering on Cu Target Kept in UHV Prior to Each Sputtering

Tuesday, November 5, 2002, 5:30 pm, Room Exhibit Hall B2

Session: Poster Session
Presenter: I. Takahiro, Yokohama City University, Japan
Authors: I. Takahiro, Yokohama City University, Japan
M. Kunisuke, Yokohama City University, Japan
Correspondent: Click to Email
The CuO and Cu@sub 2@O films were deposited on air-cleaved MgO(001) substrate by reactive dc-magnetron sputtering. The metallic Cu target was kept in UHV prior to each sputtering to avoid it's target poisoning. We determined the films structure and their orientation by reflection high-energy electron diffraction (RHEED) and X-ray diffraction (XRD). Before film deposition, it took 10 minutes for presputtering to clean the target surface. When presputtering was carried out in the Ar plasma at 10 mTorr, the CuO(111) // MgO(001) film was grown by sputtering in Ar (7 mTorr) and O@sub 2@ (3 mTorr) mixture plasma. On the other hand, the Cu@sub 2@O film was grown at the presputtering with Ar (7 mTorr) and O@sub 2@ (3mTorr) mixture plasma, where a few Cu regions were coexisted in it. The Cu@sub 2@O film had the following orientations: Cu@sub 2@O(001) // MgO(001), Cu@sub 2@O(110) // MgO(001) and Cu@sub 2@O(111) // MgO(001). These results indicate that the presputtering process is also an important factor in our system, which is probably associated with the shutter position inserted between substrate and target in presuputtering in our study. Then we have to consider about the shutter positioning effect for the presputtering. We also confirmed that the CuO and Cu@sub 2@O films are easily grown by exposing Cu film to O@sub 2@ gas at 10 mTorr. Therefore we have to discuss the thin film growth of CuO and Cu@sub 2@O from the viewpoint of the structure formation due to the condensation of the sputtered species and the oxidation of Cu film. We will make clear these effects on CuO and Cu@sub 2@O growth.