AVS 49th International Symposium
    Thin Films Tuesday Sessions
       Session TF-TuP

Paper TF-TuP11
Effect of Graphite Content on Carbon Nitride Films Prepared by Hot Carbon Filament CVD

Tuesday, November 5, 2002, 5:30 pm, Room Exhibit Hall B2

Session: Poster Session
Presenter: Y. Watanabe, National Defense Academy, Japan
Authors: S. Aizawa, National Defense Academy, Japan
M. Aono, National Defense Academy, Japan
N. Kitazawa, National Defense Academy, Japan
Y. Watanabe, National Defense Academy, Japan
O. Shimizu, Mitsubishi Pencil Co. Ltd., Japan
Y. Suda, Mitsubishi Pencil Co. Ltd., Japan
Correspondent: Click to Email
Carbon nitride (CNx) films were prepared on silicon single crystal substrates by hot filament chemical vapor deposition (HFCVD). Several kinds of carbon coils with different graphite contents, up to 90 %, were applied for the filament. The carbon coil was heated at about 2073 K in a nitrogen atmosphere of 100 Pa. The effects of the graphite content on the surface morphology and the nitrogen content in the CNx films were studied by using atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). Contamination free CNx films were prepared successfully and the nitrogen content in the films is evaluated from the photoelectron peaks of carbon and nitrogen and the sensitivity factor of the XPS. AFM observations reveal that the surface roughness of the CNx films increases with the graphite content. It is found from the XPS analysis that the nitrogen content does not depend strongly on the graphite content. SEM observations of the carbon filament after deposition show that morphologies of the filament surface have changed with the graphite content. This suggests that emitting behavior of carbon clusters varies in accordance with the graphite content.