| AVS 49th International Symposium | |
| Manufacturing Science and Technology | Tuesday Sessions |
| Session MS-TuM |
| Session: | Beyond Planar CMOS: Manufacturing Issues |
| Presenter: | J.A. Hutchby, Semiconductor Research Corporation |
| Authors: | J.A. Hutchby, Semiconductor Research Corporation V. Zhirnov, Semiconductor Research Corporation G. Bourianoff, Semiconductor Research Corporation |
| Correspondent: | Click to Email |