AVS 49th International Symposium
    Dielectrics Wednesday Sessions
       Session DI+EL-WeP

Paper DI+EL-WeP3
Screen Printing of PMN-PT Thick Films on the Pt-coated Silicon Wafers

Wednesday, November 6, 2002, 11:00 am, Room Exhibit Hall B2

Session: Poster Session
Presenter: B.M. Park, University of Texas at Dallas
Authors: B.M. Park, University of Texas at Dallas
Y.-S. Seo, University of Texas at Dallas
G.S. Lee, University of Texas at Dallas
Correspondent: Click to Email
Pb(Mg@sub 1/3@Nb@sub 2/3@)O@sub 3@-PbTiO@sub 3@ (PMN-PT) is one of the widely studied relax ferroelectrics with excellent piezoelectric and electrostrictive properties. Single crystals, ceramics, and thin films of PMN-PT have been investigated for various applications such as actuators, transducers, and etc. However, there have not been enough studies for thick film fabrication of PMN-PT and its applications. For a promising application of the mechanical actuating of PMN-PT in the silicon-based integrated processing, an easy and low-cost technique for the thick film fabrication should be developed. The screen printing is one of the well known techniques to make thick films easily. Thus, in this study, we investigated a screen printing of PMN-PT thick films for electronic applications. The two kinds of pastes with different ratios between 0.9PMN-0.1PT ceramic powders and vehicle such as 6:4 and 7:3 were used. Thick films were printed through 200 mesh or 325 mesh screens on the platinum coated silicon wafers. The printed films were burn out at 600°C then heat treated at various conditions for the sintering of ceramic powders. The films were characterized by using optical and scanning electron microscopes and X-ray diffraction. As the results, the uniform thick films of PMN-PT could be made and the thickness of a singly printed film was about 10µm after heat treatment. When the printed films were heat treated at higher temperatures and for longer times, it caused to form the pyrochlore phase. The pure perovskite PMN-PT film could be obtained when it was heat treated at 800°C for 1hour or less. To prevent the pyrochlore phase from being formed, the additions of small excess amount of PbO and MgO were studied also. The addition of excess PbO or MgO can be expected to retard the pyrochlore formation. Some electrical properties of these screen printed films will be discussed also here.