AVS 49th International Symposium
    Applied Surface Science Tuesday Sessions
       Session AS-TuA

Paper AS-TuA4
Towards Quantitative Chemical State XPS Imaging

Tuesday, November 5, 2002, 3:00 pm, Room C-106

Session: Imaging in Surface Analysis
Presenter: C.J. Blomfield, Kratos Analytical Ltd, UK
Authors: C.J. Blomfield, Kratos Analytical Ltd, UK
S. Page, Kratos Analytical Ltd, UK
A.J. Roberts, Kratos Analytical Ltd, UK
S.J. Hutton, Kratos Analytical Ltd, UK
Correspondent: Click to Email
XPS imaging is an established method for determining the qulitative lateral distribution of chemical species across a sample surface. Early methodologies for this technique involved acquiring XPS maps, where a virtual probe or X-ray spot was scanned across a sample surface and an image built up pixel by pixel as the analysis point was moved across the sample. Other methods involved the paralell detection over a predefined field of view in one specific binding energy range. Improvements in detector and instrument design in general have lead to the development of truly quantitative pulse counting methods which can give high lateral resolution XPS images with quantitative intensities. This paper describes the issues which must be adressed and the applications which could benefit from a quantitative chemical state imaging technique.