AVS 49th International Symposium
    Applied Surface Science Monday Sessions
       Session AS-MoA

Paper AS-MoA3
Quantitative XPS and the Morphology Problem : Simple Algorithm for the Amount of Substance at the Surface

Monday, November 4, 2002, 2:40 pm, Room C-106

Session: Quantification & Accuracy in Surface Analysis
Presenter: S. Tougaard, University of Southern Denmark
Correspondent: Click to Email

It is well known that due to electron attenuation, the measured XPS-peak intensity depends strongly on the in-depth atom distribution. Quantification based only on the peak intensity leads therefore to huge uncertainties. The problem was basically solved by developing models for the detailed analysis of the energy distribution of emitted electrons leading to algorithms summarized in.@footnote1@ These algorithms have been extensively tested experimentally and found to be able to determine the morphology of surfaces with quite high accuracy.@footnote 2@ Practical application of these algorithms has increased after ready to use software packages were made available@footnote 3@ and they are now being used in labs worldwide. These software packages are easy to use but they need operator interaction. They are not well suited for automatic data processing and there is an additional need for simplified strategies that can be automated. In this paper we report on a very simple algorithm that takes the morphology effect into account. It is a slightly more accurate version of the algorithm previously proposed by Tougaard (eq.(8) in@footnote 4@). Although it was proposed more than a decade ago, the practical applications of this simple formula has not previously been studied in any great detail. The algorithm gives the amount of atoms within the outermost 3 IMFPs with a good accuracy and it also gives a rough estimate for the in-depth morphology. The validity of the simple algorithm is tested on several experimental systems and the results are compared to analysis of the same samples quantified by more accurate methods. @FootnoteText@ @footnote 1@ S. Tougaard, J. Vac. Sci. Technol. A14, 1415 (1996)@footnote 2@ S. Tougaard, Surf. Interf. Anal. 26, 249 (1998) @footnote 3@ S. Tougaard: QUASES-Tougaard, Software package for Quantitative Analysis of Surfaces by Electron Spectroscopy, Ver 5.0 (see: www.quases.com).@footnote 4@ S. Tougaard, J. Vac. Sci. Technol. A8, 2197 (1990).