IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Vacuum Science & Technology Thursday Sessions

Session VST-ThM
Pressure & Flow Measurement Instruments & Their Calibration

Thursday, November 1, 2001, 8:20 am, Room 125
Moderator: K.M. Welch, Consultant


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am VST-ThM1
Is the Effective Accommodation Coefficient of the Spinning Rotor Gauge Temperature Dependent?
K.J. Jousten, Physikalisch-Technische Bundesanstalt, Germany
9:00am VST-ThM3
Using Capacitance Diaphragm Gauges at Different Temperatures
J.C. Greenwood, National Physical Laboratory, U.K., U.M.E. Christmas, University of Surrey, UK
9:40am VST-ThM5
Low-pressure Capacitiance Diaphragm Gage Measurements and Characteristics
S Lu, S.A. Tison, Mykrolis formerly Millipore Microelectronics
10:00am VST-ThM6
Static Gas Expansion Method as High-accuracy Primary Pressure Standard
W. Jitschin, University of Applied Sciences, Germany
10:20am VST-ThM7
Transfer Standard for Low Rates of Gas Flow
R.F. Berg, National Institute of Standards and Technology
10:40am VST-ThM8
Overview of Two CCM Key Comparisons in Low Pressure (1 Pa - 1000 Pa) - How Good are MEMS Sensors as Transfer Standards?
A.P. Miiller, National Institute of Standards and Technology
11:00am VST-ThM9
Some Consideration About Uncertainty on the Primary Vacuum Measurements
A. Calcatelli, M. Bergoglio, Consiglio Nazionale delle Ricerche, Italy
11:20am VST-ThM10 Invited Paper
Performance Test of Vacuum Components and System
K.H. Chung, Korea Research Institute for Standards and Science