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    Vacuum Science & Technology Thursday Sessions
       Session VST-ThM

Invited Paper VST-ThM10
Performance Test of Vacuum Components and System

Thursday, November 1, 2001, 11:20 am, Room 125

Session: Pressure & Flow Measurement Instruments & Their Calibration
Presenter: K.H. Chung, Korea Research Institute for Standards and Science
Correspondent: Click to Email

KRISS has established vacuum standards from atmospheric pressure down to ultra high vacuum of 5 x 10-7 Pa, and the leak standards in the range of 5.0 x 10-5 ~ 6.0 x 10-7 Pa-m@super 3@/s. The Ultra High Vacuum standards in the range of 5x10-7 ~ 10-3 Pa with a relative uncertainty of 2x10-2 is maintained by dynamic flow method using porous plug technique, and the High Vacuum 10-3 ~ 10-1 Pa with an uncertainty of 5 x 10-3 by dynamic flow method, and Low Vacuum 10-1 ~ 105 Pa by Ultrasonic Interferometer Manometer with an uncertainty of 10-2 ~ 10-5. Now, KRISS is developing a medium vacuum standards by volume expansion method. The market for vacuum equipments in Korea is very big since we have big semi-conductor manufacturers. But most of the vacuum equipments are imported, for our vacuum industry is very weak in technology and very small in size. We circulated Enquetes to the vacuum users, industry, universities, and research institutes, to find out why the Korean industry avoid buying Korean Vacuum products, and most people replied that the lack of reliability and credibility of our products is the most serious problem besides financial difficulties. In order to improve this situation, The Center for Vacuum Technolgy has been established in KRISS. In Center for Vacuum Technology, the integrated comprehensive test and evaluation facilities for vacuum system will be set up and certify the quality and specifications of wide ranges of vacuum gauges and mass flow controllers, all kinds of vacuum pumps, components, vacuum properties such as outgassing, thermal desorption spectroscopy and permeation and diagnostics of plasma in the system. The total testing items are 72 and number of systems is 17. The project has started in October 1999, and will continue to October 2003.