| IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11) | |
| Thin Films | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:40am | TF-WeM2 Molecular Dynamics Simulations of Self-bombardment of Compact Clusters on Pt(111) D. Adamovic, E.P. Münger, V. Chirita, L. Hultman, Linköping University, Sweden, J.E. Greene, University of Illinois, Urbana |
| 9:00am | TF-WeM3 On the Relative Motion of Thermal Gas Atoms In the Monte Carlo Simulation of Sputtering T. Nakano, S. Baba, Seikei University, Japan |
| 9:20am | TF-WeM4 Self-Similar Structure Evolution and Surface Reaction Kinetics in Low Temperature Silicon Deposition G.N. Parsons, K.R. Bray, A. Gupta, North Carolina State University |
| 9:40am | TF-WeM5 Atomic-Scale Processes in the Growth of Transition-Metal Nitrides D. Gall, C.-S. Shin, M.A. Wall, I. Petrov, J.E. Greene, University of Illinois, Urbana |
| 10:00am | TF-WeM6 Low Temperature Synthesis of Fully Textured Highly Oriented AlN Films by RF and Pulsed DC Reactive Sputtering G.F. Iriarte, F. Engelmark, I.V. Katardjiev, Uppsala University, Sweden, H.P. Loebl, Philips GmbH, Germany |
| 10:40am | TF-WeM8 A Theoretical Study of the Chemical Vapor Deposition of (100) Silicon from Silane J.K. Kang, C.B. Musgrave, Stanford University |
| 11:00am | TF-WeM9 Gas and Surface Reactions of Radicals in Hot Wire CVD of Amorphous Silicon H.L. Duan, G.A. Zaharias, S.F. Bent, Stanford University |
| 11:20am | TF-WeM10 In-Situ Determination of the Deposition Chemistry During BPSG Dielectric Thin Film Growth L.D. Flores, J.E. Crowell, University of California, San Diego |