| IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11) | |
| Thin Films | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | TF-TuM1 Influence of Processing Conditions on Sputter Deposited ZnO:Al Thin Films L.W. Rieth, P.H. Holloway, University of Florida |
| 8:40am | TF-TuM2 Linear Combinatorial Synthesis of Cadmium Tin Oxide Films by Low-pressure Chemical Vapor Deposition X. Li, T. Gessert, T. Coutts, National Renewable Energy Laboratory |
| 9:00am | TF-TuM3 Invited Paper Challenges in the Development of Novel Transparent Conducting Oxides T. Coutts, D.S. Ginley, D.L. Young, X. Li, J.D. Perkins, National Renewable Energy Laboratory |
| 9:40am | TF-TuM5 Kinetics of Hydrogen Induced Changes of Optical Properties in Smart Coatings M. Wuttig, Aachen University of Technology, Germany |
| 10:00am | TF-TuM6 Plasma Enhanced Chemical Vapour Deposition of SiO@sub x@N@sub y@ for Large Area Applications in a Matrix Distributed Electron Cyclotron Resonance Reactor A. Hofrichter, A. Charaya, B. Drevillon, Ecole Polytechnique CNRS, France |
| 10:20am | TF-TuM7 High Growth Rate Deposition of a-SiN@sub x@:H Films for Photovoltaic Applications J. Hong, W.M.M. Kessels, F.J.H. Van Assche, D.C. Schram, M.C.M. van de Sanden, Eindhoven University of Technology, The Netherlands |
| 10:40am | TF-TuM8 Electrical Characteristics and Growth of ZrO@sub2@ as a Gate Dielectric Y. Kim, Y. Kim, H. Jeon, Hanyang University, Korea |
| 11:20am | TF-TuM10 Effect of Cation Charge State and Site Occupancy on the Dielectric Response of ITCO Spinel Films C.F. Windisch Jr., K.F. Ferris, G.J. Exarhos, Pacific Northwest National Laboratory |
| 11:40am | TF-TuM11 Multi-layer Chromium-based Optical Coatings for 157nm Lithography P.D. Rack, B.W. Smith, A. Bourov, D. Baiko, Rochester Institute of Technology, M.G. Lassiter, Photronics Corp. |