IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Thin Films Monday Sessions

Session TF+NS+SE+VST-MoA
Nanophase & Multilayered Thin Films

Monday, October 29, 2001, 2:00 pm, Room 123
Moderator: E. Majkova, Institute of Physics SAS


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:40pm TF+NS+SE+VST-MoA3 Invited Paper
Precision Multilayered Thin Films for Manufacturing of the Next Generation of Computer Chips
E Spiller, Lawrence Livermore National Laboratory
3:20pm TF+NS+SE+VST-MoA5
Ion Beam Growth and Properties of SiN/TiN Multilayer Thin Films for Phase-shift Masks in Optical Lithography
P.F. Carcia, M.H. Reilly, DuPont Central Research and Development, L.J. Pilione, R.F. Messier, Pennsylvania State University, L. Dieu, DuPont Photomask, R.S. McLean, DuPont Central Research and Development
3:40pm TF+NS+SE+VST-MoA6 Invited Paper
Gold Nanoparticle Films via Inert Gas Deposition: Biased Percolation and Current Induced Organization During and after Deposition
L.B. Kish, P. Chaoguang, J. Ederth, Uppsala University, Sweden, W.H. Marlow, Texas A&M University, C.G. Granqvist, Uppsala University, Sweden
4:20pm TF+NS+SE+VST-MoA8
Deposition of Metallic Nanoclusters by Galvanic Displacement
L. Magagnin, Politecnico di Milano, Italy, C. Carraro, R. Maboudian, University of California at Berkeley
4:40pm TF+NS+SE+VST-MoA9
Cross-Linked Nano-Onions of Carbon Nitride in Thin Solid Films
L. Hultman, S. Stafstrom, Zs. Czigany, J. Neidhardt, Linköping University, Sweden, N. Hellgren, University of Illinois at Urbana-Champaign, I.F. Brunell, Linköping University, Sweden, K. Suenaga, Meijo University, Japan, C. Colliex, Universite Paris-Sud, France