| IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11) | |
| Surface Engineering | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | SE-MoA1 Multi-Level Control for Reactive Sputtering W.D. Sproul, B.E. Sylvia, Reactive Sputtering, Inc. |
| 2:20pm | SE-MoA2 The Influence of Sputtering Conditions on Microstructure and Mechanical Properties of Zr-Si-N Films Prepared by r.f.- Reactive Sputtering M. Zhou, Osaka University, Japan, M. Nose, Takaoka National College, Japan, Y. Deguchi, Toyama University, Japan, T. Mae, Toyama National College of Technology, Japan, K. Nogi, Osaka University, Japan |
| 3:00pm | SE-MoA4 Characterization of Ternary Nitride Films using Spectroscopic Ellipsometry S.M. Aouadi, T.Z. Gorishnyy, University of Nebraska - Lincoln, F. Namavar, Spire Corporation, N. Finnegan, University of Illinois at Urbana-Champaign, S.L. Rohde, University of Nebraska - Lincoln |
| 3:20pm | SE-MoA5 Invited Paper Structural and Chemical Interplays in Hard Coatings Properties: Multinary Transition Metal Nitrides F. Lévy, P. Hones, P.E. Schmid, R. Sanjinés, M. Diserens, Swiss Federal Institute of Technology in Lausanne - EPFL |
| 4:20pm | SE-MoA8 Formation of Voids and its Influence on the Thermal Stability of Co Silicide N.S. Kim, H.S. Cha, N.G. Sung, H.H. Ryu, W.G. Lee, Hynix Semiconductor, Korea |