IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Electronics Wednesday Sessions

Session EL-WeM
Si Surface Dynamics and Reactions

Wednesday, October 31, 2001, 8:20 am, Room 124
Moderator: J.E. Rowe, Army Research Office


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Click a paper to see the details. Presenters are shown in bold type.

8:20am EL-WeM1 Invited Paper
Step Motion and Morphology on Si(111)
M.S. Altman, Hong Kong University of Science and Technology
9:00am EL-WeM3
Step Fluctuations on a Chemically Heterogeneous Surface: Al/Si(111)-(@sr@3x@sr@3)@footnote 1@
I. Lyubinetsky, D.B. Dougherty, E.D. Williams, University of Maryland at College Park
9:20am EL-WeM4
Atomic and Electronic Structure of Si Layers on CaF@sub 2@/Si(111)
A.A. Bostwick, J.A. Adams, University of Washington, E. Rotenberg, Advanced Light Source, Berkeley, M.A. Olmstead, University of Washington
9:40am EL-WeM5
Surface Mass Transport and Island Nucleation during Growth of Ge on Laser Textured Si(001)
T. Schwarz-Selinger, Max Planck Institut für Plasmaphysik, Germany, D.G. Cahill, University of Illinois, Urbana
10:00am EL-WeM6
Non-thermal SiO@sub 2@ Film Growth on Si(100) using Laser-generated O(@super 1@D) and O(@super 3@P)
T.C. Coulter, A.C. Tuan, University of Washington, W.P. Hess, J.W. Rogers, Jr, Pacific Northwest National Laboratory, Y. Ono, Sharp Labs of America
10:20am EL-WeM7
On the Use of Angle-resolved XPS for Resolving Composition Structure of Ultrathin Inhomogeneous Oxide Layers
T. Conard, H. De Witte, W. Vandervorst, J. Petry, IMEC, Belgium, R. White, K.S. Robinson, Thermo VGScientific, UK
11:00am EL-WeM9
Silicon-Oxide Formation on Gold
T. Vdovenkova, A.J. Slavin, Trent University, Canada
11:20am EL-WeM10
Kinetics of the Selective Oxidation of Si(100) versus W by H@sub 2@O Steam in Hydrogen
Y. Liu, J. Hebb, Axcelis Technologies, Inc.