IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Applied Surface Analysis Tuesday Sessions

Session AS-TuA
Depth Profiling I

Tuesday, October 30, 2001, 2:00 pm, Room 134
Moderators: S. Hofmann, Max-Planck-Institute for Metals Research, Germany, R.L. Opila, Agere Systems

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Click a paper to see the details. Presenters are shown in bold type.

2:00pm AS-TuA1 Invited Paper
Sputtering-induced Effects in Ultra Shallow Depth Profiling
A.T.S. Wee, C.M. Ng, R. Liu, National University of Singapore
2:40pm AS-TuA3
Low Energy Ion-surface Interactions in Ultrashallow Profiling Investigated with In-situ Medium Energy Ion Scattering Spectroscopy
D.W. Moon, H.I. Lee, Korea Research Institute of Standards and Science, H.J. Kang, Chungbuk National University, Korea
3:00pm AS-TuA4
Low Energy Dual Beam Depth-Profiling: Influence of Sputter- and Analysis-Beam Parameters on Profile Performance using TOF-SIMS
T. Grehl, R. Moellers, E. Niehuis, ION-TOF GmbH, Germany
3:40pm AS-TuA6 Invited Paper
Reference Materials for SIMS: Philosophy, Development, and Results
D.S. Simons, National Institute of Standards and Technology