IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Thin Films Thursday Sessions
       Session TF-ThP

Paper TF-ThP21
DLC Thin Films Characterized by AES, XPS and EELS

Thursday, November 1, 2001, 5:30 pm, Room 134/135

Session: Thin Film Deposition/Carbon-Containing Films Poster Session
Presenter: E.C. Samano, CCMC-UNAM, Mexico
Authors: E.C. Samano, CCMC-UNAM, Mexico
G. Soto, CCMC-UNAM, Mexico
L. Cota, CCMC-UNAM, Mexico
Correspondent: Click to Email
DLC films have been grown by laser ablating a graphite target in a UHV system. Two kinds of depositions are processed depending on the experimental conditions, a HOPG film and a DLC film. A relationship of the film microstructure with laser power density and substrate conditions was observed. The films are in situ monitored and characterized during the first stages of the deposition process by means of surface spectroscopic techniques, such as AES, XPS and EELS. The film microstructure is confirmed by SEM. Clear evidence of a SiC interface of two monolayers thick was clearly observed to form due to the reaction of the first carbon species impinging on the substrate surface.