IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Thin Films Thursday Sessions
       Session TF-ThP

Paper TF-ThP20
The Effect of Substrate Bias and Nitrogen Incorporation on the Diamond-like Carbon Film Depositions by 90°-bend Magnetic Filtered Cathodic Arc Evaporation Plasma

Thursday, November 1, 2001, 5:30 pm, Room 134/135

Session: Thin Film Deposition/Carbon-Containing Films Poster Session
Presenter: W.-J. Hsieh, National Tsing Hua University, Taiwan
Authors: W.-J. Hsieh, National Tsing Hua University, Taiwan
J.-H. Lin, National Tsing Hua University, Taiwan
P.-S. Shih, National Tsing Hua University, Taiwan
X.-W. Liu, National Tsing Hua University, Taiwan
H.C. Shih, National Tsing Hua University, Taiwan
Correspondent: Click to Email
The properties of nitrogen incorporated diamond-like carbon (DLC) films were deposited on silicon (111) wafers by a 90°-bend Magnetic filtered cathodic Arc Evaporation Plasma system. The structure and properties have been studied by TEM/EELS, Raman spectra, Vickers hardness, RBS, and SIMS spectra. For the DLC depositions using highly ionized energetic plasma, carbon ions with varying energies can form different types of carbon bonding in the films. The energies can be controlled by applying a variable bias to the substrate. It has been reported that the DLC films have the highest hardness with a substrate pulsed bias between -100V to -150V, and the maximum sp@super3@ bonding content can be obtained at a pulsed bias of -150V (duty cycle:50%) is up to 85% as measured by TEM/EELS. The DLC films have a higher hardness when the content of sp@super3@ bonds have a higher fraction of sp@super3@ bonding contents. The hardness seems to be related to the Raman I(D)/I(G) ratio. It also founds that nitrogen content increases with increasing substrate bias and the deposition temperature on DLC films. However, the deposition above 400°C causes a sudden loss of sp@super3@ bonding. The maximum incorporation of nitrogen to the DLC films was measured up to 15%(N) by SIMS as well as RBS.