IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Thin Films Thursday Sessions
       Session TF-ThP

Paper TF-ThP13
In-situ Fabrication of Polycrystalline Thin Film Cathodes for Secondary Thin Film Batteries using Radio Frequency Sputter Deposition

Thursday, November 1, 2001, 5:30 pm, Room 134/135

Session: Thin Film Deposition/Carbon-Containing Films Poster Session
Presenter: F.C. Hsu, National Tsing Hua University, Taiwan
Authors: K.-F. Chiu, National Tsing Hua University, Taiwan
F.C. Hsu, National Tsing Hua University, Taiwan
M.K. Wu, National Tsing Hua University, Taiwan
T.-P. Perng, National Tsing Hua University, Taiwan
Correspondent: Click to Email
In situ deposition of polycrystalline LiNi0.8Co0.2O2 thin films was performed using radio frequency magnetron sputter deposition on indium tin oxide substrates. Different substrate temperatures, upto 500 oC, were applied during deposition. The films deposited at elevated temperature exhibited a strong preferred orientation (or texture). It was found that varying the substrate temperature resulted in changing in film texturing. As the substrate temperature increased, the film structure changed from non-crystalline to polycrystalline with enhanced preferred orientation. The film texture was examined using X-ray diffraction (XRD) method. The surface morphology was observed using optical microscope and scanning electron microscope. The compositions of the targets and films were characterized by an inductively coupled plasma spectroscopy method (ICP) and were found to be identical. The change of texturing was interpreted by volume strain energy and surface energy minimization. Textured polycrystalline thin films can be deposited by controlling the deposition temperature. The technique was also used to deposit polycrystalline LiCoO2, LiNiO2 and LiMn2O4 thin films, and similar results were obtained.