IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Thin Films Thursday Sessions
       Session TF-ThP

Paper TF-ThP10
High Rate Deposition of TiO@sub 2@, TiN, and TiO@sub 2@/TiN/TiO@sub 2@ Thin Films Using New High Power Magnetron Sputtering Source and Comparison with Its Optical Characteristics

Thursday, November 1, 2001, 5:30 pm, Room 134/135

Session: Thin Film Deposition/Carbon-Containing Films Poster Session
Presenter: Y.-S. Sin, Sungkyunkwan University, Korea
Authors: M.J. Jung, Sungkyunkwan University, Korea
H.Y. Lee, Sungkyunkwan University, Korea
Y.-S. Sin, Sungkyunkwan University, Korea
J.G. Han, Sungkyunkwan University, Korea
J.-H. Boo, Sungkyunkwan University, Korea
Correspondent: Click to Email
Thin films of TiO@sub 2@, TiN and TiO@sub 2@/TiN/TiO@sub 2@ were deposited on glass substrates at a temperature below 200 °C using a newly developed pulsed DC magnetron sputtering source with high power (20 - 150 W/cm @super 2@) and unbalanced magnetron. Titanium metal target (4-inch diameter, 99.9% purity) was mounted onto the sputtering sources, and oxygen and nitrogen were used as reactive gases and argon as working gas. Highly oriented, crack-free, stoichiometric polycrystalline TiO@sub 2@(101) and TiN(100) thin films were successfully grown on glass surfaces at 200 °C. In the case of the TiO@sub 2@ deposition, a thin film with high transmittance (90%) in the visible range was obtained while the TiN films showed very high reflectance (70%) in the infrared region. In this study, however, we found that the transmittance and reflectance are strongly influenced by the film thickness and the film surface roughness. For comparison, a multilayer film of TiO@sub 2@/TiN/TiO@sub 2@ was also deposited on glass substrates under the same growth condition as for TiO@sub 2@ and TiN thin films based on computer simulation results. Quite good optical properties can be obtained for the as-grown multilayer films. The most excellent values of transmittance (85%) and reflectance (80%) were found for a thin film with TiO@sub 2@ (380 nm)/TiN (20 nm) /TiO@sub 2@ (440 nm)/glass structure. The high IR reflection indicates that the as-grown multilayer film can be applied for heat mirrors.