IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Plasma Science Tuesday Sessions
       Session PS2-TuM

Paper PS2-TuM6
Syntheses of Carbon Nanotubes and Nanocapsules by Plasma Chemical Vapor Deposition

Tuesday, October 30, 2001, 10:00 am, Room 104

Session: Emerging Applications of Plasmas
Presenter: Y. Hayashi, Kyoto Institute of Technology, Japan
Authors: Y. Hayashi, Kyoto Institute of Technology, Japan
M. Kawana, Kyoto Institute of Technology, Japan
S. Nishino, Kyoto Institute of Technology, Japan
Correspondent: Click to Email
Carbon nano-materials such as nanotubes, fullerenes, or nanocapsules have been synthesized by the methods of arc discharge, laser evaporation, and thermal chemical-vapor-deposition (CVD). Recently it was reported that multi-wall carbon nanotubes were grown being well aligned perpendicularly to substrates of catalytic metals by plasma CVD, and they are expected to be used for a field emission display. From these results, we came to think that fine-particles of carbon nano-materials can be synthesized by glow-discharge plasma CVD. Fine-particles are suspended in a glow-discharge plasma for a long period because they are negatively charged in it. Therefore larger fine-particles composed of nano-materials can grow in the plasma. And also the modification and control of the materials are expected being suspended in a plasma. A surface-wave-excited 2.45GHz-microwave plasma was used for the syntheses. It was generated in a vacuum chamber by a microwave propagating through a slot antenna. A fine-particle collector, whose electric potential can be controlled from the outside, was put below the plasma. The gas of 10-40 % methane diluted in hydrogen was introduced into the chamber under a gas pressure of 100-700 Pa. Collected fine-particles were analyzed by scanning electron microscopy. Materials of tubular structure of 50-100 nm in diameter and cavity-like spherical and cubic structures of 100-200 nm in size were observed. They should be carbon nanotubes and nanocapsules. Detailed analyses by transmission electron microscopy are going to be performed.