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    NBS-NIST Centennial Sunday Sessions
       Session NB-SuP

Paper NB-SuP6
The NIST Synchrotron Ultraviolet Radiation Facility

Sunday, October 28, 2001, 6:20 pm, Room 121

Session: NBS/NIST Centennial
Presenter: U. Arp, National Institute of Standards and Technology
Authors: U. Arp, National Institute of Standards and Technology
M.L. Furst, National Institute of Standards and Technology
E.W. Hagley, National Institute of Standards and Technology
T.B. Lucatorto, National Institute of Standards and Technology
C.S. Tarrio, National Institute of Standards and Technology
C.W. Clark, National Institute of Standards and Technology
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In 1961 NBS established the first dedicated synchrotron radiation source, the Synchrotron Ultraviolet Radiation Facility (SURF). The first experiment performed at SURF, two-electron photoexcitation of He, created significant excitement in the world of atomic physics, and demonstrated the utility of synchrotron radiation for performing experiments in the vacuum ultraviolet and beyond. The SURF synchrotron, designed for nuclear physics experiments, was converted to the SURF II electron storage ring, which is more suitable as a radiation source. A SURF II - SURF III upgrade, accomplished in 1998, involved replacement of the original synchrotron magnet with a new magnet for improved field uniformity and higher energies, and an enhanced radio-frequency system for more stable operation. SURF III plays a key role in synchrotron-based radiometric metrology at NIST, especially in the DUV and EUV regions of the spectrum, for three reasons. First, SURF’s optical output is easily calculable from first principles. This characteristic is related to the fact that it has a perfectly circular orbit. Second, SURF can operate stably over a wide range of electron energies, from below 100 MeV to 380 MeV, which allows one to tune the wavelength of peak output over different regions of the DUV and EUV and thus minimize effect of out-of-bandwidth radiation. The third relates to the stability of the continuous output. Since 1967 SURF has been used to provide calibration services, starting with the calibration of standard detectors in the UV spectral region. Since then several other metrological activities have been implemented at SURF III beamlines. Beamline 2 is home to a spectrometer calibration facility, which allows users to calibrate space-borne photodetector packages in the wavelength region from 1 nm to 400 nm with an accuracy of less than 1 %. Beamline 3 is currently being developed as the U.S. National Standard for the calibration of standard light sources in the air UV from 200 nm to 400 nm. Beamline 4 provides us with the ability to calibrate standard detectors in the region from 120 nm to 320 nm in support of the U.S. National UV scale. Beamline 7 provides characterization of thin-film multilayer EUV mirrors, having the unique capability of handling mirrors as large as 450 mm, which is especially relevant to the developers of EUV lithography. Beamline 9 provides the Nation’s standard for detectors in the region from 5 nm to 50 nm, in continuation of the program started in 1967.