IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    NBS-NIST Centennial Sunday Sessions
       Session NB-SuP

Paper NB-SuP11
Future Directions of Vacuum and Low Gas-Flow Metrology at NIST

Sunday, October 28, 2001, 6:20 pm, Room 121

Session: NBS/NIST Centennial
Presenter: A. Lee, National Institute of Standards and Technology
Authors: A. Lee, National Institute of Standards and Technology
J.P. Looney, National Institute of Standards and Technology
A.P. Miiller, National Institute of Standards and Technology
P.J. Abbott, National Institute of Standards and Technology
Correspondent: Click to Email
The vacuum and low-flow metrology project areas at NIST develop and maintain standards to disseminate the highest measurement capability to US industry, advance measurement science, and establish international measurement comparability. In the years to come, we plan to: Introduce New Measurement Standards: - Investigate intrinsic pressure standards based on material fixed points and atomic calculations - Extend spinning rotor gauges ~10@super -7@ Pa, potentially replacing ion gauges entirely as secondary standards - Develop in-situ, non-intrusive flow calibration techniques for reactive gases and vapors in semiconductor fabrication - Offer a leak-into-atmosphere calibration service and extend the range of the leak-into-vacuum service (applications OLED-substrate permeation, refrigeration, nuclear containment, pressure vessels, etc.) - Develop primary oil manometers utilizing a 4-color column-height determination scheme - Create an on-demand SRG calibration service via provision/exchange of calibrated rotors Improve Current Standards and Measurement Capabilities: - Reduce uncertainties in our orifice flow standard by nearly an order of magnitude - Work with industry to make RGAs more reliable and quantitative instruments - Offer on-site proficiency testing of mass flow controllers, and thermophysical data on new electronic gases Ensure Measurement Comparability: - Continued leadership in international, regional and domestic comparisons of measurement standards - Improve the vacuum metrology capability of the SIM region - Develop a real-time capability to remotely operate and observe instruments under calibration or testing