IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Microelectromechanical Systems (MEMS) Friday Sessions
       Session MM+BI+NS+EL+SS-FrM

Paper MM+BI+NS+EL+SS-FrM6
Chemical Detection Based on Nanostructured MEMS Sensors

Friday, November 2, 2001, 10:00 am, Room 130

Session: New Frontiers in MEMS: NEMS and BioMEMS
Presenter: P.G. Datkos, Oak Ridge National Laboratory
Authors: P.G. Datkos, Oak Ridge National Laboratory
M.S. Sepaniak, University of Tennessee
N. Lavrik, University of Tennessee
C.A. Tipple, University of Tennessee
Correspondent: Click to Email
The recent advent of MEMS devices has opened-up new possibilities for chemical detection. Microcantilevers respond to chemical stimuli by undergoing changes in their bending when molecules adsorb on their surface. Increased effective surface area is important in such systems because it results in increased total energy of interfacial interactions. In fact, in nanostructured surfaces (quasi 3-D interfaces) the effective surface stresses can significantly exceed true surface stresses. We used electron beam lithography to fabricate ordered nanofeatures on the surfaces of a microcantilever, We then functionalized the nanostructured surface with a beta-cyclodextrine coating (to impart chemical selectivity) using self-assembled monolayer techniques. We found an increase of two orders of magnitude when nanostructured coatings have been used. We present and discuss our findings on the interactions of functionalized microcantilevers with tetrachloroethylene molecules.