IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Microelectromechanical Systems (MEMS) Friday Sessions
       Session MM+BI+NS+EL+SS-FrM

Paper MM+BI+NS+EL+SS-FrM2
Micromechanical Cantilever Magnetometers with Integrated Quantum Dots

Friday, November 2, 2001, 8:40 am, Room 130

Session: New Frontiers in MEMS: NEMS and BioMEMS
Presenter: M. Wilde, University of Hamburg, Germany
Authors: M. Wilde, University of Hamburg, Germany
M. Schwarz, University of Hamburg, Germany
D. Grundler, University of Hamburg, Germany
C. Heyn, University of Hamburg, Germany
D. Heitmann, University of Hamburg, Germany
Correspondent: Click to Email
We have prepared highly sensitive micromechanical cantilever magnetometers with integrated semiconductor quantum dots. They allow us to study, for the first time, the very tiny magnetic moment of the quantum dots which contain only a few 100 electrons. We have used GaAs-AlAs-molecular beam epitaxy with its inherent atomic precision, both, for the optimization of the mechanical properties of the cantilever and for the monolithic integration of the investigated electronic nanostructures.@footnote 1@ Using laser-interference lithography, tailored periodic arrays of quantum dots have been prepared on the beam. Experiments have been performed down to a temperature of 250 mK in a magnetic field up to 16 T. Field-induced magnetic oscillations have been observed on the quantum dots. The magnetization is significantly different from that of the two-dimensional reference sample and exhibits several new features. Our results suggest that, both, the quantum confinement and the effect of electron-electron interaction have an important effect on the magnetic moment of the quantum dots. Support by the Deutsche Forschungsgemeinschaft Gemeinschaft via Sonderforschungsbereich SFB 508 is gratefully acknowledged. @FootnoteText@ @footnote 1@ M. Schwarz, D. Grundler, I. Meinel, Ch. Heyn, and D. Heitmann, Appl. Phys. Lett. 76, 3564 (2000).