IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Applied Surface Analysis Monday Sessions
       Session AS-MoM

Paper AS-MoM3
Application of Spectrum Imaging and Multivariate Statistical Analysis to Time-of-Flight Secondary Ion Mass Spectrometry@footnote 1@

Monday, October 29, 2001, 10:20 am, Room 134

Session: Quantitative Analysis and Data Interpretation I: SIMS
Presenter: J.A. Ohlhausen, Sandia National Laboratories
Authors: J.A. Ohlhausen, Sandia National Laboratories
M.R. Keenan, Sandia National Laboratories
D.E. Peebles, Sandia National Laboratories
P.G. Kotula, Sandia National Laboratories
Correspondent: Click to Email
The combination of spectrum imaging and multivariate spectral image analysis for information extraction have recently been applied as powerful new phase mapping tools in a variety of materials characterization techniques. In this process, an image is collected by acquiring an entire spectrum for each pixel of the image. Subsequently, multivariate spectral image analysis is applied to the image data to obtain the primary component spectra from each significant phase present in the image. Finally, the distribution of each phase may be obtained from the initial image and primary component spectra to provide a detailed phase mapping of the surface composition. No subjective guesses as to the identity of phases believed to be present are required to complete the phase identification and mapping process, and much of the spectral noise is removed from the image. Instead, the robust statistical process is able to unambiguously identify all of the spectral features uniquely associated with each distinct phase throughout the image, providing information well beyond that contained in a series of traditional image maps. In this work, this new approach is applied to Time-of-Flight Secondary Ion Mass Spectrometry (TOF SIMS) images, illustrating the power and advantages of precise phase identification and imaging for a number of representative sample materials.