IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Applied Surface Analysis Monday Sessions
       Session AS-MoA

Paper AS-MoA9
Real and Gedanken Experiments Related to Surface Charging during XPS Measurements of Insulating Materials and Thin Films

Monday, October 29, 2001, 4:40 pm, Room 134

Session: Quantitative Analysis and Data Interpretation II: Electron Spectroscopies
Presenter: D.R. Baer, Pacific Northwest National Laboratory
Authors: D.R. Baer, Pacific Northwest National Laboratory
M.H. Engelhard, Pacific Northwest National Laboratory
Y. Liang, Pacific Northwest National Laboratory
A.S. Lea, Pacific Northwest National Laboratory
D.J. Gaspar, Pacific Northwest National Laboratory
C.F. Windisch, Pacific Northwest National Laboratory
Correspondent: Click to Email
The ability to accurately obtain binding energy measurements can be important for interpretation of XPS data for many different applications. In recent studies of thin oxidized aluminum layers we have seen a range of phenomena that both confound easy data analysis and provide opportunities to learn critical information about oxide layers. In this paper, we will examine the binding energies obtained from oxidized aluminum formed in aqueous solutions and transferred to vacuum without exposure to air. Data from pure aluminum and copper containing aluminum alloys will be compared with each other and to other data in the literature. Influence of ion and electron bombardment and oxide doping will be presented. A more general examination of some issues related to understanding binding energies from oxides and oxide films will be discussed. A summary of some physical phenomena that occur during XPS measurements of thin insulating layers on conducting or semi-conducting substrates that can complicate charge referencing will be given. Some classic experiments of grounded and ungrounded specimens will be reported for a new generation of instruments with advanced methods of charge control and illustrative data from other systems will be reported.