IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Applied Surface Analysis Monday Sessions
       Session AS-MoA

Paper AS-MoA8
VAMAS TWA2 Project A2, Evaluation of Static Charge Stabilization and Determination Methods in XPS on Non-conducting Samples: Report on an Inter-laboratory Comparison

Monday, October 29, 2001, 4:20 pm, Room 134

Session: Quantitative Analysis and Data Interpretation II: Electron Spectroscopies
Presenter: W.E.S. Unger, Bundesanstalt fuer Materialforschung und -pruefung (BAM), Germany
Authors: W.E.S. Unger, Bundesanstalt fuer Materialforschung und -pruefung (BAM), Germany
Th. Gross, Bundesanstalt fuer Materialforschung und -pruefung (BAM), Germany
O. Boese, Bundesanstalt fuer Materialforschung und -pruefung (BAM), Germany
A. Lippitz, Bundesanstalt fuer Materialforschung und -pruefung (BAM), Germany
Th. Fritz, Bundesanstalt fuer Materialforschung und -pruefung (BAM), Germany
U. Gelius, Uppsala Universitet, Sweden
Correspondent: Click to Email
Results of an inter-laboratory comparison (27 participants in Europe, Japan and USA) of XPS data obtained with non-conductive samples are presented. Binding energies of Al 2s for alumina, N 1s and imide C 1s for Kapton and Sr 3p3/2 for a strontium titanate film on glass were obtained after static charge referencing with the help of 15 nm gold particles deposited at the surface of the test samples. For the alumina sample C 1s static charge referenced data are presented, too. In any case repeat standard deviations, between standard deviations, reproducibility standard deviations and total means are evaluated from the experimental data. It can be stated, that though the repeat standard deviation is small as 0.05 eV in the best case, the standard devia-tion characterizing the reproducibility of the method is obviously not better than 0.15 eV, also in the best case, at the present time. The knowledge of these standard deviations is important for metrology, validations of analytical procedures relying on qualitative photoelectron spectroscopy and XPS databanking.