| AVS 47th International Symposium | |
| Thin Films | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | TF-TuA1 Invited Paper The Nanomechanical Properties of Thin Films J.E. Houston, Sandia National Laboratories. |
| 2:40pm | TF-TuA3 Anomalous Plastic and Elastic Behaviors of Sputter-deposited TiN with 10 or 20 Inserted Thin Al Layers Evaluated by Nanoindentation E. Kusano, N. Kikuchi, K. Tsuda, H. Nanto, A. Kinbara, Kanazawa Institute of Technology, Japan |
| 3:00pm | TF-TuA4 Tungsten Silicide (WSi2) for the Alternate Gate Metal in Metal-Oxide-Semiconductor (MOS) Devices K. Roh, S. Youn, S. Yang, Y. Roh, Sungkyunkwan University, Korea |
| 3:20pm | TF-TuA5 Structural and Mechanical Properties of TiC/Ti and TiC/B@sub 4@C Multilayers Deposited by Pulsed Laser Deposition A.R. Phani, J.E. Krzanowski, University of New Hampshire, J.J. Nainaparampil, Systran, Inc. |
| 3:40pm | TF-TuA6 Structural Studies of AlN Thin Films during Low Temperature RF Sputter Deposition F. Engelmark, G.F. Iriarte, I.V. Katardjiev, M. Ottosson, University of Uppsala, Sweden, P. Muralt, Laboratiore de Ceramique, Switzerland, S. Berg, University of Uppsala, Sweden |
| 4:00pm | TF-TuA7 Invited Paper Multifunctional Ceramic Films C.R. Aita, University of Wisconsin, Milwaukee |
| 4:40pm | TF-TuA9 Quantification of Scratch Resistance and Accelerated Wear for Thin Film Coatings Using the Newly Developed Micro-Tribometer and Testing Procedure C. Gao, N. Gitis, Center for Tribology |
| 5:00pm | TF-TuA10 Lubricating Characteristics of Zinc Oxide: Effect of Carbon, Silicon and Boron as Additives J.J. Nainaparampil, Systran Federal/Air Force Research Lab, J.S. Zabinski, Air Force Research Lab |