AVS 47th International Symposium | |
Thin Films | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
8:20am | TF-ThM1 Optical Thin Film Multilayer Systems for Thermal Emittance Modulation in the 300K Blackbody Spectral Region C.L. Trimble, E.B. Franke, University of Nebraska, Lincoln, J.S. Hale, J.A. Woollam Company, Lincoln, M. Schubert, J.A. Woollam, University of Nebraska, Lincoln |
8:40am | TF-ThM2 Structural Characterization of High and Low Index PECVD Optical Coating Materials: The Case of Titanium Dioxide and Silicon Dioxide V. Hajek, M. Latreche, J.E. Klemberg-Sapieha, L. Martinu, Ecole Polytechnique, Canada, A. Argoitia, W.T. Beauchamp, Optical Coating Laboratory Inc. |
9:00am | TF-ThM3 Porous Thin Film Microstructure Control for Tuned Optical Properties J.C. Sit, S.R. Kennedy, M.J. Brett, University of Alberta, Canada |
9:20am | TF-ThM4 Development of a PECVD Antireflective Layer for 193nm Polysilicon Gate Applications W. Fan, Y. Wang, K. MacWilliams, J. Tian, Z. Karim, Novellus Systems, Inc., K. Ring, Conexant Systems |
9:40am | TF-ThM5 Characterizing Bi-Layer ARC for Advanced Lithography I. Bloomer, D.V. Likhachev, J. Lam, D. Harrison, n&k Technology |
10:00am | TF-ThM6 A Near-grazing-incidence, Antireflective Coating for 121.6 nm for a Mars-bound Neutral Particle Detector. S. Olson, D.D. Allred, M.B. Squires, D. Markos, C.E. Mills, R.T. Turley, Brigham Young University |
10:20am | TF-ThM7 Studies of Pulsed DC Power in Magnetron Sputtering Systems P.J. Kelly, J. O'Brien, University of Salford, UK, J.W. Bradley, UMIST, UK, R. Hall, G. Roche, Advanced Energy Industries Inc., R.D. Arnell, University of Salford, UK |
10:40am | TF-ThM8 Invited Paper Art and Science of Fabricating Optical Coatings by PECVD L. Martinu, Ecole Polytechnique, Canada, D. Poitras, National Research Council of Canada |
11:20am | TF-ThM10 Inhomogeneous Optical Coatings Deposited by Plasma D. Poitras, National Research Council, Canada, L. Martinu, Ecole Polytechnique, Canada |
11:40am | TF-ThM11 Uranium Coated Optics for Space Applications in the Extreme Ultraviolet D.D. Allred, R.T. Turley, Brigham Young University, W.C. Cash, University of Colorado, M.B. Squires, D. Oliphant, Brigham Young University |