AVS 47th International Symposium
    Thin Films Thursday Sessions

Session TF-ThM
Optical Films

Thursday, October 5, 2000, 8:20 am, Room 203
Moderator: W.T. (Pat) Beauchamp, OCLI/JDSU


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am TF-ThM1
Optical Thin Film Multilayer Systems for Thermal Emittance Modulation in the 300K Blackbody Spectral Region
C.L. Trimble, E.B. Franke, University of Nebraska, Lincoln, J.S. Hale, J.A. Woollam Company, Lincoln, M. Schubert, J.A. Woollam, University of Nebraska, Lincoln
8:40am TF-ThM2
Structural Characterization of High and Low Index PECVD Optical Coating Materials: The Case of Titanium Dioxide and Silicon Dioxide
V. Hajek, M. Latreche, J.E. Klemberg-Sapieha, L. Martinu, Ecole Polytechnique, Canada, A. Argoitia, W.T. Beauchamp, Optical Coating Laboratory Inc.
9:00am TF-ThM3
Porous Thin Film Microstructure Control for Tuned Optical Properties
J.C. Sit, S.R. Kennedy, M.J. Brett, University of Alberta, Canada
9:20am TF-ThM4
Development of a PECVD Antireflective Layer for 193nm Polysilicon Gate Applications
W. Fan, Y. Wang, K. MacWilliams, J. Tian, Z. Karim, Novellus Systems, Inc., K. Ring, Conexant Systems
9:40am TF-ThM5
Characterizing Bi-Layer ARC for Advanced Lithography
I. Bloomer, D.V. Likhachev, J. Lam, D. Harrison, n&k Technology
10:00am TF-ThM6
A Near-grazing-incidence, Antireflective Coating for 121.6 nm for a Mars-bound Neutral Particle Detector.
S. Olson, D.D. Allred, M.B. Squires, D. Markos, C.E. Mills, R.T. Turley, Brigham Young University
10:20am TF-ThM7
Studies of Pulsed DC Power in Magnetron Sputtering Systems
P.J. Kelly, J. O'Brien, University of Salford, UK, J.W. Bradley, UMIST, UK, R. Hall, G. Roche, Advanced Energy Industries Inc., R.D. Arnell, University of Salford, UK
10:40am TF-ThM8 Invited Paper
Art and Science of Fabricating Optical Coatings by PECVD
L. Martinu, Ecole Polytechnique, Canada, D. Poitras, National Research Council of Canada
11:20am TF-ThM10
Inhomogeneous Optical Coatings Deposited by Plasma
D. Poitras, National Research Council, Canada, L. Martinu, Ecole Polytechnique, Canada
11:40am TF-ThM11
Uranium Coated Optics for Space Applications in the Extreme Ultraviolet
D.D. Allred, R.T. Turley, Brigham Young University, W.C. Cash, University of Colorado, M.B. Squires, D. Oliphant, Brigham Young University