| AVS 47th International Symposium | |
| MEMS | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MM-WeM1 Microfabricated Platform for Semiconducting Metal Oxide Thin Film Gas Sensors D.J. Frankel, C. Silvestre, G. Bernhardt, S.C. Moulzolf, N. LeCursi, R.J. Lad, University of Maine |
| 8:40am | MM-WeM2 The Use of Micromachined Arrays to Develop Processing/Performance Databases for Metal/Oxide Sensing Materials J.E. Tiffany, R.E. Cavicchi, S. Semancik, National Institute of Standards and Technology |
| 9:00am | MM-WeM3 Chemical Detection Based on Adsorption-Induced and Photo-Induced Stresses in MEMS Devices P.G. Datskos, S. Rajic, L.R. Senesac, Oak Ridge National Laboratory, I. Datskou, Environmental Engineering Group, Inc., M.S. Sepaniak, C.A. Tipple, B.C. Fagan, University of Tennessee |
| 9:20am | MM-WeM4 Optical Emission Study of a Microfabricated Inductively Coupled Plasma O. Minayeva, J.A. Hopwood, Northeastern University |
| 9:40am | MM-WeM5 A Micromachined Scanning Fabry-Perot Interferometer F.C. LI, N.E. McGruer, P.M. Zavracky, K.L. Denis, Northeastern University |
| 10:00am | MM-WeM6 Invited Paper Passivation of MEMS Structures that are Integrated with Support Electronics J.R. Martin, Analog Devices Inc. |