| AVS 47th International Symposium | |
| MEMS | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | MM-ThA1 Stress Measurement in MEMS Devices L.A. Starman, Air Force Institute of Technology, J.D. Busbee, Air Force Research Laboratory Materials Directorate, J. Reber, Wright State University, J.F. Maguire, W.D. Cowan, Air Force Research Laboratory Materials Directorate |
| 2:20pm | MM-ThA2 Invited Paper Issues in MEMS Reliability and Characterization S. Brown, Exponent, Inc. |
| 3:00pm | MM-ThA4 MOCVD PZT as a Pathway to Integrated Piezoelectric MEMS I.-S. Chen, J.F. Roeder, ATMI, D.-J. Kim, J.-P. Maria, A.I. Kingon, North Carolina State University |
| 3:20pm | MM-ThA5 Deposition of Highly Oriented LiCoO@sub 2@ Thin Films for Use as Cathodes in Thin Film Batteries J.A. Ruffner, T.J. Boyle, D. Ingersoll, K.P. Peters, M.A. Rodriguez, J. Liang, Sandia National Laboratories |
| 3:40pm | MM-ThA6 Invited Paper Microstructure and Mechanical Properties of Polysilicon and Poly-SiC Films for MEMS H. Kahn, A.H. Heuer, Case Western Reserve University |
| 4:20pm | MM-ThA8 Comparison of In-situ Boron-doped and In-situ Phosphorus-doped Polysilicon Films for Microelectromechanical Systems J.J. McMahon, J.M. Melzak, C. Zorman, J. Chung, M. Mehregany, Case Western Reserve University |
| 4:40pm | MM-ThA9 Investigation of the Friction and Adhesion Properties of BPT and BPTC Self-assembled Monolayers by AFM H. Liu, B. Bhushan, The Ohio State University, W. Eck, V. Stadler, University of Heidelberg, Germany |
| 5:00pm | MM-ThA10 Viewing a Moving Surface Contact: An STM-QCM Study of Vapor Deposited Films on Metal Surfaces B. Borovsky, M. Abdelmaksoud, J. Krim, North Carolina State University |