AVS 47th International Symposium | |
MEMS | Thursday Sessions |
Session MM-ThA |
Session: | Material Science of MEMS |
Presenter: | H. Liu, The Ohio State University |
Authors: | H. Liu, The Ohio State University B. Bhushan, The Ohio State University W. Eck, University of Heidelberg, Germany V. Stadler, University of Heidelberg, Germany |
Correspondent: | Click to Email |