| AVS 47th International Symposium | |
| MEMS | Thursday Sessions |
| Session MM-ThA |
| Session: | Material Science of MEMS |
| Presenter: | H. Liu, The Ohio State University |
| Authors: | H. Liu, The Ohio State University B. Bhushan, The Ohio State University W. Eck, University of Heidelberg, Germany V. Stadler, University of Heidelberg, Germany |
| Correspondent: | Click to Email |