| AVS 47th International Symposium | |
| Vacuum Technology | Wednesday Sessions |
| Session VT-WeP |
| Session: | Poster Session |
| Presenter: | A. Kasahara, National Research Institute for Metals, Japan |
| Authors: | A. Kasahara, National Research Institute for Metals, Japan M. Goto, National Research Institute for Metals, Japan M. Tosa, National Research Institute for Metals, Japan K. Yoshihara, National Research Institute for Metals, Japan |
| Correspondent: | Click to Email |