AVS 47th International Symposium
    Thin Films Tuesday Sessions
       Session TF-TuP

Paper TF-TuP7
The Effect of Heat-treatment on the Structural and Mechanical Properties of MoS@sub 2@/Ti Composite Coatings

Tuesday, October 3, 2000, 5:30 pm, Room Exhibit Hall C & D

Session: Poster Session
Presenter: B.J. Kim, Eindhoven University of Technology, The Netherlands
Authors: B.J. Kim, Eindhoven University of Technology, The Netherlands
J.H. Dautzenberg, Eindhoven University of Technology, The Netherlands
Correspondent: Click to Email
MoS@sub 2@/Ti composite coatings have been coated on stainless steel by dc magnetron sputtering. After deposition, MoS@sub 2@/Ti coatings were heat-treated in vacuum in order to investigate the effect of heat treatment on the mechanical properties of the coating. Before and after heat treatment, the structure and concentration of co-sputtered MoS@sub 2@/Ti coating were analyzed by x-ray diffraction method, energy disperse spectroscopy, as well as x-ray photoelectron spectroscopy. The mechanical properties of the coatings such as hardness, elastic modulus, residual stress, and critical fracture strain of bending, were also measured by nano-indentation method, thin foil method, and bending test with electro-chemical detection. Ti addition to MoS@sub 2@ coating prohibits the micro- or macro-crystallized structure of the coating, and MoS@sub 2@/Ti coating makes a single-phase solid solution structure up to 20 at% Ti. Mechanical properties of coating are dependent on Ti concentration. The hardness and elastic modulus of MoS@sub 2@/Ti composite coatings increased as increasing Ti concentration. The residual stresses of MoS@sub 2@/Ti composite coatings dramatically increased by adding Ti to MoS@sub 2@ coating. MoS@sub 2@/Ti composite coatings were micro- or macro-crystallized if the heat treatment temperature was higher than 500°C. It resulted in the increase of porosity and decrease of hardness of the coating. The concentration of sulfur abruptly decreased, if the heat treatment temperature is higher than 750°C.