AVS 47th International Symposium
    Thin Films Monday Sessions
       Session TF-MoM

Invited Paper TF-MoM5
Selective Growth of ZnO Thin Film on Microprinted Si Substrate

Monday, October 2, 2000, 9:40 am, Room 203

Session: Atomic Layer Chemical Vapor Deposition I
Presenter: R.P.H. Chang, Northwestern University
Authors: M. Yan, Northwestern University
R.P.H. Chang, Northwestern University
J. Ni, Northwestern University
J.R. Babcock, Northwestern University
T.J. Marks, Northwestern University
Correspondent: Click to Email
ZnO is an inexpensive transparent conductive material that has already received intensive studies. Recently, its interesting optical property has made it a potential LED material. Various techniques, including chemical vapor deposition (CVD), sputtering, pulse laser deposition (PLD) and atomic layer epitaxy (ALE), have been used to deposit ZnO thin film onto different substrates. In order to make devices, patterned ZnO film has to be achieved. Typically, features can be fabricated using photolithography. For mass production, however, a low cost and high throughput method is needed. In this research, ZnO thin film was deposited onto microprinted Si substrate using ALE. 1-trichlorosilyl-docosane(CH@sub 3@(CH@sub 2@)@sub 21@SiCl@sub 3@) and perfluorodecyl-1H,1H,2H,2H-trichlorosilane(CF@sub 3@(CF@sub 2@)@sub 7@CH@sub 2@CH@sub 2@SiCl@sub 3@), both of which have a long hydrophobic alkyl chain, were used as ink in microprinting. The -SiCl@sub 3@ group in the above compounds can react with the -OH groups on the surface of Si substrate, thus the hydrophobic chain was fixed on the surface of Si. Water and diethylzinc (DetZn) were used as precursors in ALE. Since water can not stick to the areas that have been covered with ink, selective growth of ZnO can be achieved. Preliminary study shows that selective growth of ZnO has been realized on microprinted Si substrates, which has feature size of 50m. Optical and Scanning Electronic Microscopy (SEM) observations show that features have satisfactory sharpness. Discussion of low temperature ALE of ZnO on different substrate, such as glass and flexible polyethylene terephthalate (PET), will be reported.