AVS 47th International Symposium
    Semiconductors Thursday Sessions
       Session SC+EL+SS-ThM

Paper SC+EL+SS-ThM9
Infrared Studies of Hydrogen on Diamond (100)

Thursday, October 5, 2000, 11:00 am, Room 306

Session: Hydrogen On and In Semiconductors
Presenter: J.N. Russell, Jr., Naval Research Laboratory
Authors: J.N. Russell, Jr., Naval Research Laboratory
J. Hovis, University of Wisconsin
R.J. Hamers, University of Wisconsin
G.T. Wang, Stanford University
S.F. Bent, Stanford University
M.P. D'Evelyn, General Electric CRD
J.E. Butler, Naval Research Laboratory
Correspondent: Click to Email
Hydrogen atoms play a critical role in the chemical vapor deposition of diamond thin films. Currently, hydrogen plasmas are used to produce reproducible, clean, smooth, diamond (100) single-crystal surfaces. The use of diamond films for microelectronic or surface acoustic wave devices requires a fundamental understanding of the diamond surface termination and its interaction with adsorbed species. The hydrogen terminated diamond (100) surface is comprised of two 2x1 domains of monohydride surface dimers. Using s- and p-polarized multiple internal reflection infrared spectroscopy, the symmetric and asymmetric stretches of the HCCH surface dimer are easily resolved and are compared to ab initio calculations of the frequencies. The thermal dependence of the CH stretches is monitored as a function of the anneal temperature. When the hydrogen terminated surface is covered with a condensed layer of physisorbed molecules, the surface CH vibrational frequency is significantly influenced. We discuss the implications of these observations.