AVS 47th International Symposium
    Material Characterization Tuesday Sessions
       Session MC-TuP

Paper MC-TuP6
Analysis of Delta Multilayer Profiles Measured by Secondary Ion Mass Spectrometry

Tuesday, October 3, 2000, 5:30 pm, Room Exhibit Hall C & D

Session: Poster Session
Presenter: A. Takano, NTT Advance Technology Corporation, Japan
Authors: A. Takano, NTT Advance Technology Corporation, Japan
Y. Higashi, NTT Advance Technology Corporation, Japan
Y. Homma, NTT Basic Research Laboratories, Japan
J. Kikuma, SIMS-Depth Profiling WG, Japan
S. Soga, SIMS-Depth Profiling WG, Japan
Y. Okamoto, SIMS-Depth Profiling WG, Japan
R. Oishi, SIMS-Depth Profiling WG, Japan
S. Hayashi, SIMS-Depth Profiling WG, Japan
R. Saito, SIMS-Depth Profiling WG, Japan
M. Tomita, SIMS-Depth Profiling WG, Japan
Y. Ueki, SIMS-Depth Profiling WG, Japan
S. Seo, SIMS-Depth Profiling WG, Japan
F. Toujou, SIMS-Depth Profiling WG, Japan
S. Yoshikawa, SIMS-Depth Profiling WG, Japan
J. Kinoshita, SIMS-Depth Profiling WG, Japan
D.W. Moon, Korea Research Institute of Standards and Science, Korea
Correspondent: Click to Email
Delta-doped multilayers are potential reference materials for the evaluation of depth resolution in secondary ion mass spectrometry (SIMS). For this purpose establishing standard procedures of depth resolution evaluation is necessary, as well as developing reliable delta multilayers. We tested a theoretical model, mixing-roughness-information depth (MRI) model@footnote 1@ for extracting depth resolution parameters from the measured profiles in the round-robin study using a delta-multilayer specimen that includes five GaAs-doped delta layers separated by amorphous Si layers. The measured arsenic profiles were analyzed using the MRI model. For SIMS, information depth in the model can be regarded to be very small, so we used the only two parameters concerning mixing and roughness. The mixing parameters showed very little in-depth variation but dependence only on primary-ion energy and impact angle, irrespective of the instrument types used. This means that the mixing parameter may be regarded as a physical quantity. The roughness parameter and its in-depth dependence, on the other hand, varied among participating laboratories, reflecting the measurement conditions and surface roughening. @FootnoteText@ @footnote 1@ S. Hofmann, Surf. Interface Anal. 21 (1994) 673