AVS 47th International Symposium
    Material Characterization Tuesday Sessions
       Session MC-TuP

Paper MC-TuP29
Controlled Surface Charging as an Analysis Tool in XPS of Mesoscopic Systems

Tuesday, October 3, 2000, 5:30 pm, Room Exhibit Hall C & D

Session: Poster Session
Presenter: H. Cohen, Weizmann Institute of Science, Israel
Authors: H. Cohen, Weizmann Institute of Science, Israel
K. Shabtai, Weizmann Institute of Science, Israel
S.R. Cohen, Weizmann Institute of Science, Israel
I. Rubinstein, Weizmann Institute of Science, Israel
Correspondent: Click to Email
A novel application of X-ray photoelectron spectroscopy (XPS) is presented, using controlled surface charging (CSC) in dielectric/conductive mesoscopic heterostructures. The method is based on the induction of well-defined potential gradients by means of the electron flood gun. The resultant local potential variations are projected on the photoelectron energy scale, directly detected as XPS line shifts, providing high-quality spatial information down to nanometer scale resolution. The method is applicable to a large variety of systems, offering important advantages over existing XPS-based techniques. Applications of the method will be demonstrated.