AVS 47th International Symposium
    Material Characterization Tuesday Sessions
       Session MC-TuP

Paper MC-TuP11
Comparison of Sputter Rate and Interfacial Resolution in a Multi-instrument Surface Science Laboratory

Tuesday, October 3, 2000, 5:30 pm, Room Exhibit Hall C & D

Session: Poster Session
Presenter: M.H. Engelhard, Pacific Northwest National Laboratory
Authors: M.H. Engelhard, Pacific Northwest National Laboratory
A.S. Lea, Pacific Northwest National Laboratory
D.J. Gaspar, Pacific Northwest National Laboratory
G.C. Dunham, Pacific Northwest National Laboratory
T. Thevuthasan, Pacific Northwest National Laboratory
D.R. Baer, Pacific Northwest National Laboratory
Correspondent: Click to Email
A multi-instrument, multi-technique laboratory faces a wide variety of analysis needs. Although much is known about the parameters that influence sputtering and the ability of a technique to resolve an interface, variations among different instruments reflect the geometry and design of each instrument, as well as the conditions convenient for operation and actual performance of an ion gun. Each instrument has advantages and limitations for specific types of analyses. In order to determine the actual performance of various instruments found in the Environmental Molecular Sciences Laboratory, we have measured interfacial resolution and sputtering rates produced for common operating and a few optimized sputter conditions for several instruments. The capabilities of these instruments include X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), time-of-flight secondary ion mass spectrometry (TOF-SIMS), and accelerator based materials analysis. Samples used for these studies included Si/SiO@sub 2@, Ta/Ta@sub 2@O@sub 5@ and Ni/Cr multilayer standards. For instruments with sample rotation capability, data has been collected with and without rotation. Using this data, we have developed a matrix describing the performance of the various techniques and instruments. We utilize this matrix to choose the appropriate instrumentation to acquire the desired information at the required accuracy for a wide range of scientific studies in the minimum time.