| AVS 46th International Symposium | |
| Vacuum Technology Division | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | VT-WeM1 Affect on Pumping-Speed Measurements Due to Variations of Test Dome Design Based on Monte-Carlo Analysis S.B. Nesterov, Yu.K. Vassiliev, Moscow Power Engineering Institute, Russia, R.C. Longsworth, IGC-APD Cryogenics, Inc. |
| 8:40am | VT-WeM2 A Highly Simplified and Reliable Means of Regenerating Closed-Loop Gaseous Helium Cryopumps D.W. Crone, J. Brady, M.O. Foreman, Ebara Technologies Inc., K.M. Welch, Consultant |
| 9:00am | VT-WeM3 Invited Paper Review of Pumping by Thermal Molecular Pressure J.P. Hobson, National Vacuum Technologies Inc., Canada, D.B. Salzman, Polychip Inc. |
| 9:40am | VT-WeM5 Inner Pressure Measurement of Turbo Molecular Pump H.-P. Cheng, R.-Y. Jou, J.-C. Lin, F.-Z. Chen, Y.-W. Chang, Precision Instrument Development Center, National Science Council, Taiwan, ROC |
| 10:00am | VT-WeM6 Measurement of Axial Pressure Distribution on a Rotor of a Helical Grooved Molecular Drag Pump T. Sawada, W. Sugiyama, Akita University, Japan, K. Takano, Mitsui Zosen Ltd., Japan |
| 10:20am | VT-WeM7 An MHD Plasma Vacuum Pump E.S. Ensberg, Microwave Plasma Products, Inc. |
| 10:40am | VT-WeM8 Stable Sputter Ion Pump Design J.B. McGinn, FEI Company |
| 11:40am | VT-WeM11 Dry Vacuum Pumps for Semiconductor Processes - Guidelines for Primary Pump Selection P.A. Lessard, Varian, Inc. |