AVS 46th International Symposium
    Vacuum Technology Division Wednesday Sessions
       Session VT-WeM

Paper VT-WeM6
Measurement of Axial Pressure Distribution on a Rotor of a Helical Grooved Molecular Drag Pump

Wednesday, October 27, 1999, 10:00 am, Room 610

Session: Vacuum Pumping Systems
Presenter: T. Sawada, Akita University, Japan
Authors: T. Sawada, Akita University, Japan
W. Sugiyama, Akita University, Japan
K. Takano, Mitsui Zosen Ltd., Japan
Correspondent: Click to Email
The theory in regard to the pumping performance of a helical grooved molecular drag pump proposed by the authors has been employed successfully as a design and evaluation tool. However, some researchers presented results different from the authors' using direct simulation Monte Carlo method. Their method included the inlet effect and the secondary flow in grooves either of which was neglected in the authors' theory. This study was planned to examine the validity of the authors' theory precisely. A helical grooved cylindrical rotor was located concentrically in a smooth sleeve. In order to obtain the pressure distribution on the rotor, several taps were installed on the sleeve along axial direction. The taps led to one side of a differential pressure gauge via valves and the upstream side of the rotor was connected to the other side of the gauge. The pressure was measured by switching the valves in turn. The measurements show that (a) the pressure in the free molecule flow regime increases exponentially from the inlet to outlet, (b) the pressure increases almost linearly from the inlet to outlet in the slip and viscous flow regime, and (c) the inlet effect becomes remarkable in the turbulent flow regime. The validity of the theory has been proved from the free molecule to viscous flow regimes, but the theory needs modification so as to include the inlet effect in the turbulent flow regime.