| AVS 46th International Symposium | |
| Vacuum Metallurgy Division | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| VM-TuP1 Pattern Writing by Implantation in a Large-scale PSII System with Planar Inductively Coupled Plasma Source L. Wu, D.M. Manos, T.J. Venhaus, College of William and Mary |
| VM-TuP2 Growth of SiC Thin Films on Graphite for Oxidation Protective Coating J.-H. Boo, M.C. Kim, C.H. Heo, S.-B. Lee, S.-J. Park, J.-G. Han, SungKyunKwan University, Korea |
| VM-TuP3 Novel Technique for Low Temperature Chemical Vapor Deposition of Titanium Thin Films on Mild-Steel Surfaces for Corrosion Resistance J.H. Hendricks, M.I. Aquino, M.R. Zachariah, National Institute of Standards and Technology |
| VM-TuP5 Friction Evaluation and Development of Vacuum Materials for Tribological System M. Tosa, A. Kasahara, Y.S. Kim, K. Yoshihara, National Research Institute for Metals, Japan |