AVS 46th International Symposium | |
Thin Films Division | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
2:00pm | TF+VM-MoA1 Characterization of PVD TiN/CN@subx@ and TiN/Si@sub3@N@sub4@ Multilayer Coatings Y.H. Chen, Y.W. Chung, Northwestern University |
2:20pm | TF+VM-MoA2 Effects of Interface Mixing on Adhesion of Amorphous Carbon Films Synthesized by Variable-Energy Direct Carbon Ion Beam Deposition M.H. Sohn, S. Kim, SKION Corporation |
2:40pm | TF+VM-MoA3 Synthesis of Diamondlike Carbon Films with Superlow Friction and Wear Properties A. Erdemir, O.L. Eryilmaz, G. Fenske, Argonne National Laboratory |
3:00pm | TF+VM-MoA4 Optical Characteristics of Carbon Nitride: Relationship with Mechanical Behavior and Possible Fullerene-like Microstructure V. Hajek, D. Poitras, D. Dalacu, Ecole Polytechnique, Canada, A. Bergeron, Optical Coating Laboratory Inc., L. Martinu, Ecole Polytechnique, Canada, K. Rusnak, J. Vlcek, University of West Bohemia, Czech Republic |
3:20pm | TF+VM-MoA5 Preparation and Properties Enhancement of Silicon Carbonitride Films Using Reactive Magnetron Sputtering X.-M. He, K.C. Walter, M. Nastasi, Los Alamos National Laboratory |
4:00pm | TF+VM-MoA7 Bonding Structure and Optical Properties of Si-doped Diamond-like Films Synthesized by Plasma Immersion Ion Processing X.-M. He, K.C. Walter, M. Nastasi, Los Alamos National Laboratory |
4:20pm | TF+VM-MoA8 Surface Acoustic Wave Propagation Properties of Nitrogenated Diamond-like Carbon Films J.Y. Kim, H.J. Chung, H.J. Kim, Seoul National University, Korea, H.M. Cho, H.K. Yang, J.C. Park, Korea Electronics Technology Institute |
4:40pm | TF+VM-MoA9 High Deposition Rate Diamondlike Carbon Films Deposited using Permanenet Magnet Electron Cyclotron Resonance Plasmas C. Doughty, J.B. Bailey, ASTeX PlasmaQuest |
5:00pm | TF+VM-MoA10 Polymerization in Remote Hydrocarbon Deposition Plasmas A. de Graaf, M.F.A.M. van Hest, M.C.M. van de Sanden, K.G.Y. Letourneur, D.C. Schram, Eindhoven University of Technology, The Netherlands |