| AVS 46th International Symposium | |
| The Science of Micro-Electro-Mechanical Systems Topical Conference | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | MM-WeA1 Invited Paper Micro-Science and Tribology L. Lin, The University of Michigan |
| 2:40pm | MM-WeA3 Deposition, Characterization and Degradation of Vacuum-deposited Fluorinated Alkylsiloxane Films T.M. Mayer, M.P. de Boer, N.D. Shinn, T.A. Michalske, Sandia National Laboratories |
| 3:00pm | MM-WeA4 Vapor-Phase Lubricants: Nanometer-scale Mechanisms and Applications to Sub-micron Machinery M. Abdelmaksoud, B. Borovsky, J. Krim, North Carolina State University |
| 3:20pm | MM-WeA5 Adhesion Performance of Silane Coupling Agents at High Humidity Levels M.P. de Boer, T.M. Mayer, T.A. Michalske, R.W. Carpick, Sandia National Laboratories, R. Maboudian, U. Srinivasan, University of California, Berkeley |
| 3:40pm | MM-WeA6 Adhesion Properties of Gold-on-Gold Microswitch Contacts S. Majumder, N.E. McGruer, G.G. Adams, P.M. Zavracky, R.H. Morrison, Northeastern University, J. Krim, North Carolina State University |
| 4:00pm | MM-WeA7 Environmental Effects on the Tribological Behavior of Silane-Treated Micromachines@footnote 1@ M.T. Dugger, J.A. Ohlhausen, G.A. Poulter, Sandia National Laboratories |
| 4:20pm | MM-WeA8 Selective Organophosphonate Chemical Sensors Using Self-Assembled Composite Monolayers and Adsorption-Induced Stresses in MEMS Devices P.G. Datskos, H.M. Meyer, Oak Ridge National Laboratory, D. Karst, Virginia Tech, M.J. Sepaniak, University of Tennessee |
| 4:40pm | MM-WeA9 Nanofabrication and Electrostatic Operation of Single-crystal Silicon Paddle Oscillators D.W. Carr, S. Evoy, L. Sekaric, A. Olkhovets, J.M. Parpia, H.G. Craighead, Cornell University |
| 5:00pm | MM-WeA10 MEMS-Based Force Detected Nuclear Magnetic Resonance Spectrometer T. George, W. Tang, A. Chang-Chien, D.W. Elliott, Jet Propulsion Laboratory, L. Madsen, G. Leskowitz, D. Weitekamp, California Institute of Technology |