AVS 46th International Symposium
    Thin Films Division Tuesday Sessions
       Session TF-TuM

Paper TF-TuM8
Atomic Layer Controlled Growth of SiO@sub 2@ and Al@sub 2@O@sub 3@ on BN Particles Using Sequential Surface Chemistry

Tuesday, October 26, 1999, 10:40 am, Room 615

Session: Advanced Thin Film Formation Chemistry
Presenter: J.D. Ferguson, University of Colorado, Boulder
Authors: J.D. Ferguson, University of Colorado, Boulder
A.W. Weimer, University of Colorado, Boulder
S.M. George, University of Colorado, Boulder
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BN particles have a high thermal conductivity and are relatively inert. To improve BN particle coupling in polymer composites for thermal management applications, ultrathin coatings can be deposited that are more reactive and do not degrade the BN thermal properties. SiO@sub 2@ and Al@sub 2@O@sub 3@ were grown on BN particles with atomic layer control using sequential surface reactions of SiCl@sub 4@/H@sub 2@O@footnote 1@ and Al(CH@sub 3@)@sub 3@/H@sub 2@O,@footnote 2@ respectively. The sequential surface chemistry was monitored in vacuum using transmission Fourier transform infrared vibrational spectroscopy. The initial BN particles displayed B-OH and B-NH@sub 2@ surface species. These groups reacted with SiCl@sub 4@ or Al(CH@sub 3@)@sub 3@ and converted the surface species to Si-Cl or Al-CH@sub 3@. The subsequent reaction with H@sub 2@O converted the surface species to Si-OH or Al-OH. By repeating the sequential surface reactions, SiO@sub 2@ and Al@sub 2@O@sub 3@ bulk vibrational modes increased with number of reaction cycles. Transmission electron microscopy studies revealed conformal coatings on the BN particles. X-ray photoelectron spectroscopy analysis was also consistent with uniform and conformal deposition. These results illustrate the potential of sequential surface reactions to deposit conformal and atomic layer controlled coatings on particles. @FootnoteText@ @footnote 1@ J.W. Klaus, A.W. Ott and S.M. George, Appl. Phys. Lett. 70, 1092 (1997). @footnote 2@ A.W. Ott, J.W. Klaus and S.M. George, Thin Solid Films 292, 135 (1997).