AVS 46th International Symposium
    Thin Films Division Tuesday Sessions
       Session TF-TuA

Paper TF-TuA10
Phase Development of Radio Frequency Magnetron Sputter Deposited Pb(Mg@sub 1/3@Nb@sub 2/3@)O@sub 3@-PbTiO@sub 3@ (90/10) Thin Films

Tuesday, October 26, 1999, 5:00 pm, Room 615

Session: Fundamentals of Si and Dielectric PVD
Presenter: J.-K. Lee, Korea Institute of Science and Technology
Authors: J.-K. Lee, Korea Institute of Science and Technology
D.K. Park, Korea Institute of Science and Technology
D.-S. Cheong, Korea Institute of Science and Technology
J.-W. Park, Hanyang University, Korea
Correspondent: Click to Email
The electrostrictive properties of relaxors, PMN-PT, have been the focus of intensive studies in view of their application in microactuator. This is because at around the dielectric constant maximum, relaxors exhibit large electrostrictive strain, the strain-field relationship is practically free of hysteresis, and the effective piezoelectric coefficient can be tuned by changing the magnitude of the dc bias field. PMN-PT films were deposited by r.f. magnetron sputter deposition from Pb, Mg enriched ceramic targets. The Perovskite structural analysis was confirmed by X-ray diffraction. Film growth was carried out over a wide range of processing parameters such as substrate temperature, sputtering pressures, and post annealing conditions. We focus on the formation of 100% Perovskite structured PMN-PT film with good electrostrictive properties. Composition and phase development were controlled by observing the sputter physics and the depositon mechanism. In case of the film containing the volatile species such as Pb and Mg, the sputtering pressure must be controlled. We also discuss the role of excessive MgO phase on the nanocomposite characteristics in PMN-PT films.