AVS 46th International Symposium
    Surface Science Division Thursday Sessions
       Session SS3+AS+NS-ThM

Paper SS3+AS+NS-ThM10
The Miniature Cylindrical Mirror Analyzer: A New Tool For Surface Analysis

Thursday, October 28, 1999, 11:20 am, Room 604

Session: Novel Surface Probes & Technique Enhancement
Presenter: K. Grzelakowski, Focus Polska Sp. Z o.o., Poland
Authors: K. Grzelakowski, Focus Polska Sp. Z o.o., Poland
M.S. Altman, Hong Kong University of Science and Technology, P.R. China
Correspondent: Click to Email
The design and performance of a new miniature cylindrical mirror analyzer (CMA) are presented. The CMA comprises outer and inner cylinders, integral on-axis electron gun, and detector system consisting of ring aperture and channeltron, all mounted on a 2.75" flange. Entrance angle, sample-to-detector distance, and polar cone angle were chosen, in consideration of second order focussing effects, that optimized analyzer transparency and resolution. Fringe field correction at the ends of the CMA is made by means of six rings precisely separated by sapphire insulators. The electron gun is a one-lens electrostatic system equipped with XY-deflector for beam adjustment and scanning. A CeB6 low temperature cathode operating at up to -2.0keV delivers emission current up to 100 mA. The energy range of analyzed electrons can be varied between 0 eV to 2.0 keV. The flange mounting also incorporates a high precision Z-motion for optimization of the working distance. The control electronics and software permit operation of the instrument in pulse and phase sensitive detection modes. Results obtained for a W(001) surface with this new miniature CMA demonstrate an energy resolution of 0.08%, which is comparable to larger 6" and 8" flange mounted instruments. The very small size of the mini-CMA permits its use in small or crowded ultra high vacuum chambers or where only 2.75" ports are available, thereby increasing flexibility in surface analysis.