AVS 46th International Symposium
    Manufacturing Science and Technology Group Wednesday Sessions
       Session MS-WeA

Paper MS-WeA9
Determining Ion Flux and Ion Energy from Radio-Frequency Current and Voltage Measurements

Wednesday, October 27, 1999, 4:40 pm, Room 611

Session: Metrology II
Presenter: M.A. Sobolewski, National Institute of Standards and Technology
Correspondent: Click to Email

To obtain optimal results from plasma processing, the flux and energy of ions incident on the substrate must be carefully monitored and controlled. Several diagnostic techniques are used to measure ion flux and ion energy, but these techniques are typically not very compatible with the processes and reactors used by industry. Methods have been proposed for determining ion properties from the applied current and voltage waveforms, which can be measured in commercial reactors. However, such methods are usually not very accurate because they rely on false or untested assumptions. Here, a new, more accurate method is presented which makes use of a complete model of the time-dependent ion dynamics in the plasma sheath. The model was validated by comparison to independent measurements of ion flux, ion energy, and time-resolved optical emission, for high-density discharges in an inductive GEC Reference Cell. Measurements were performed for discharges in Ar, Ar/SF@sub 6@, and Ar/Cl@sub 2@, for inductive source powers up to 370 W, rf bias powers up to 100 W, rf bias frequencies of 0.1-13.56 MHz, and pressures of 0.67-4.0 Pa. An analysis of the sensitivity of ion flux and ion energy results to model parameters will be presented, along with comparisons showing the improvement in accuracy obtained by the new technique.